EECE.5190 Engineering of Submicron Machines (Formerly 16.519)

Description

Recently fabrication of Very Large Scale Integrated circuits has spun-off a new technology of micro-machines (MEMS) and sensors on a semiconductor wafer. These new devices are ideally located next to a microprocessor on the same wafer or a separate chip. The data transfer to and from a miniature machine, sensor or transducer is processed and controlled on site. Topics include design of mechanical, electrical and biological transducers; properties of electronic materials; pattern generation on a semiconductor wafer; interface of a micromachine and processor; applications and markets for submicron machines.

Course prerequisites/corequisites are determined by the faculty and approved by the curriculum committees. Students are required to fulfill these requirements prior to enrollment. For courses offered through online or GPS delivery, students are responsible for confirming with the instructor or department that all enrollment requirements have been satisfied before registering.